JPH0632566Y2 - 光学式変位検出器 - Google Patents
光学式変位検出器Info
- Publication number
- JPH0632566Y2 JPH0632566Y2 JP1989070393U JP7039389U JPH0632566Y2 JP H0632566 Y2 JPH0632566 Y2 JP H0632566Y2 JP 1989070393 U JP1989070393 U JP 1989070393U JP 7039389 U JP7039389 U JP 7039389U JP H0632566 Y2 JPH0632566 Y2 JP H0632566Y2
- Authority
- JP
- Japan
- Prior art keywords
- scale
- scale member
- mounting member
- displacement detector
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000006073 displacement reaction Methods 0.000 title claims description 46
- 230000003287 optical effect Effects 0.000 title claims description 40
- 238000005286 illumination Methods 0.000 claims description 19
- 229920003002 synthetic resin Polymers 0.000 claims description 15
- 239000000057 synthetic resin Substances 0.000 claims description 15
- 238000001514 detection method Methods 0.000 claims description 8
- 230000005489 elastic deformation Effects 0.000 claims description 7
- 238000005259 measurement Methods 0.000 description 10
- 239000011521 glass Substances 0.000 description 7
- 230000033001 locomotion Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000005452 bending Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989070393U JPH0632566Y2 (ja) | 1989-06-16 | 1989-06-16 | 光学式変位検出器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989070393U JPH0632566Y2 (ja) | 1989-06-16 | 1989-06-16 | 光学式変位検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0310206U JPH0310206U (en]) | 1991-01-31 |
| JPH0632566Y2 true JPH0632566Y2 (ja) | 1994-08-24 |
Family
ID=31606514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989070393U Expired - Fee Related JPH0632566Y2 (ja) | 1989-06-16 | 1989-06-16 | 光学式変位検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632566Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5108289B2 (ja) * | 2005-12-06 | 2012-12-26 | 株式会社ミツトヨ | 変位測定装置用スケール |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3316081A1 (de) * | 1983-05-03 | 1984-11-08 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Messeinrichtung |
| JPS61105803U (en]) * | 1984-12-18 | 1986-07-05 | ||
| JPS61206811A (ja) * | 1985-03-06 | 1986-09-13 | 株式会社ミツトヨ | 機械要素の連結構造 |
| DD249615A3 (de) * | 1985-05-02 | 1987-09-16 | Zeiss Jena Veb Carl | Messstabfassung fuer laengenmesssysteme |
-
1989
- 1989-06-16 JP JP1989070393U patent/JPH0632566Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0310206U (en]) | 1991-01-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |